High precision with minimum feature size < 100 nm

3D fabrication with ultra-fast scanning speed up to 80000 mm/s

large printing volume compatible with up to 12-inch substrate

high stability and high flexibility

Additive and subtractive 2D/3D manufacturing

Multifunctional system designed for polymer, glass, metal and alloy

Nanoscale resolution and precision

Fully automatic operation

Compact but fully-equipped design

3D lithography with 160 nm linewidth

One-click rapid prototyping for research purposes

Up to 300 nm resolution

Smooth edge and minimal stitching error

Up to 300 mm²/min