High precision with minimum feature size < 100 nm
3D fabrication with ultra-fast scanning speed up to 80000 mm/s
large printing volume compatible with up to 12-inch substrate
high stability and high flexibility
Additive and subtractive 2D/3D manufacturing
Multifunctional system designed for polymer, glass, metal and alloy
Nanoscale resolution and precision
Fully automatic operation
Compact but fully-equipped design
3D lithography with 160 nm linewidth
One-click rapid prototyping for research purposes
Up to 300 nm resolution
Smooth edge and minimal stitching error
Up to 300 mm²/min