UV-Smart
Desktop level maskless UV lithography equipment
Category:
Maskless Direct-Write Lithography Equipment
Keywords:
Maskless Direct-Write Lithography Equipment
UV-Smart is specifically designed for laboratory research needs and small-scale production. Its compact design is well-suited for laboratory environments, featuring high writing speed, high resolution, and high alignment accuracy. With integrated design and fully automatic control, it offers easy operation, suitable for rapid prototyping or small-batch production. Widely used in fields such as microfluidics, semiconductor, biotechnology, and microelectronics.
Key Features
➤ Fast and simple alignment process for achieving 2D/2.5D micro-nano structure processing
➤ High flexibility with one-click switching between multiple processing modes, including optional grayscale exposure
➤ Pattern preview function and alignment error compensation
➤ Automatic surface leveling and autofocus for consistent processing
➤ Fully automated visual control system with graphical programming language, significantly enhancing equipmentcontrol flexibility and autonomy
➤ Adaptability to various substrates, with a vacuum suction platform suitable for different sizes and shapes of substrates
Applications
Resolution chart
Microlenses
Diffractive optical element(DOE)
Customer Service
➤ Pre-sales customized service
We offer professional solutions according to customer processing needs; provide post-application expansion, reserved hardware and software interfaces.
➤ Technical service support
We provide hotline, remote control and on-site support; Provide users performance optimization, daily maintenance, parts replacement, application expansion and upgrade of the system.
➤ Lifetime application support
We provide free software upgrade, provide support such as test schemes, application operations, result analysis, and provide maintenance and solutions for common faults.
➤ Lifetime maintenance support
Equipped with professional maintenance engineers, 2 hours response, 72 hours to arrive at the scene.We provide extended warranty service, free training and lifetime maintenance.
Product Inquiry
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