UV-Ultra
High-performance maskless direct writing lithography equipment
Category:
Maskless Direct-Write Lithography Equipment
Keywords:
Maskless Direct-Write Lithography Equipment
UV-Ultra is a high-performance maskless UV lithography equipment designed for high-end and industrial applications. It employs advanced ultra-high-speed processing methods, combined with proprietary algorithms and high-performance hardware, to achieve higher alignment, stitching, and overlay accuracy. With high writing speed and high resolution, it is suitable for rapid and precise processing needs.
UV-Ultra features integrated design and fully automatic control, offering easy operation and compatibility with substrates up to 12 inches. Widely used in fields such as microfluidics, semiconductor, biotechnology, and microelectronics.
Key Features
➤ Suitable for large-scale production and industrial applications
➤ Offers multiple processing modes from nanometer to tens of micrometers, achieving higher processing precision and speed
➤ Fast and simple alignment process for achieving 2D/2.5D micro-nano structure processing
➤ Pattern preview function and alignment error compensation
➤ Automatic surface leveling and autofocus, ensuring processing consistency
➤ Enhanced expandability with optional modular accessories and rapid upgrade services
➤ Infinite field of writing without stitching
➤ Fully automatic visual process control system and graphical and process editing language, increasing equipment control flexibility
➤ Higher alignment, stitching, and overlay accuracy
➤ Long-term stability control system, ensuring processing stability and consistency
➤ Larger processing area, suitable for different sizes of substrates, providing automated sample vacuum chuck fixtures
➤ Grayscale exposure
Applications
Photolithography mask(DOE)
Microfluidic channel
Optical ring structure
Customer Service
➤ Pre-sales customized service
We offer professional solutions according to customer processing needs; provide post-application expansion, reserved hardware and software interfaces.
➤ Technical service support
We provide hotline, remote control and on-site support; Provide users performance optimization, daily maintenance, parts replacement, application expansion and upgrade of the system.
➤ Lifetime application support
We provide free software upgrade, provide support such as test schemes, application operations, result analysis, and provide maintenance and solutions for common faults.
➤ Lifetime maintenance support
Equipped with professional maintenance engineers, 2 hours response, 72 hours to arrive at the scene.We provide extended warranty service, free training and lifetime maintenance.
Product Inquiry
If you are interested in this product, please leave your inquiry content and your phone/email, and we will contact you as soon as possible! Please contact us in time to get your exclusive offer！
Address
No. 1 Rongchang Road, Huangbohai District, Yantai City, Shandong Province, China
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