MN-UV-Smart

Maskless direct laser writing
equipment

Up to 300 nm resolution

Smooth edge and minimal stitching error

Up to 300 mm²/min

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Technical specifications

Printing technology:Maskless UV lithography (Standard)

Minimum lateral feature size:1 μm *

Maximum writing speed:≥30 mm²/min *

Maximum writing area:100 mm x 100 mm

Splicing precision:<0.8 μm *

Autofocusing:Optical

Light:405 nm/365 nm

*Depending on the solution set, objective or photoresist,optional